Inorganic SiO₂ membranes on Al₂O₃ wafer substrates were prepared by Sol-gel method using TEOS as the precursor. The effects of coating temperature, the concentrations of Sol and additive on the performance of membranes were systematically analyzed. Results show that coating at higher temperature can improve the performance of membranes; coating process with the combination of concentrated sol and diluted sol not only improves coating efficiency, but also improves the performance of membranes. In addition, the additives DMF can homogenize the pore size of membranes and improve the performance of inorganic SiO2 membranes. （From : No.3, 2006 Glass & Enamel )